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Lithography

Across
A subtractive process.
Changes the electrical properties of the active silicon region.
Deposition/Lift-Off is this kind of process.
Lithography tool that operates at 193 nm wavelength light.
Lithography tool that employs reflective optics (mirrors).
Down
Mask type that allows most light to pass--polygons block light.
Polarity of a feature in which the feature is at a level lower than the surrounding material.
Resist type that when exposed to light becomes more soluble in the developer.